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发明名称
SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号
KR100264109(B1)
申请公布日期
2000.09.01
申请号
KR19950018716
申请日期
1995.06.30
申请人
TOKYO ELECTRON KYUSHU LIMITED;TOKYO ELECTRON LIMITED
发明人
AKIMOTO, MASAMI;KIMURA, YOSHIO;HASEBE, KEIJYO;NAKASHIMA, SHINJI;SEMBA, NORIO;YIYIDA, NARUAKI;HARADA, GOJI;UEDA, YITSEI;KONISHI, NOBUO
分类号
H01L21/00;(IPC1-7):H01L21/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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