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发明名称
PROBE APPARATUS
摘要
申请公布号
KR100263841(B1)
申请公布日期
2000.09.01
申请号
KR19960010613
申请日期
1996.04.09
申请人
TOKYO ELECTRON LIMITED
发明人
AKAIKE, YUTAKA;MOCHIJUKI, JIAKI;KONO, ISAO;YOSIOKA, HARUHIKO
分类号
G01R31/28;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
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地址
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