METHOD AND APPARATUS FOR DEVELOPING TREATMENT,申请号KR19950028201-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR DEVELOPING TREATMENT
摘要
申请公布号	KR100262902(B1)	申请公布日期	2000.09.01
申请号	KR19950028201	申请日期	1995.08.31
申请人	TOKYO ELECTRON KYUSHU LIMITED;TOKYO ELECTRON LIMITED	发明人	TANAKA, HIDEYA;MORIOKA, NORIMITSU;KIMURA, YOSHIO;YOSHIHARA, KOSUKE
分类号	B05C11/08;G03F7/30;(IPC1-7):H01L21/027	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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