摘要 |
PURPOSE: An ink jet printer head and a fabrication method thereof are provided to prevent the phenomenon of tearing of a membrane plate, and to improve the action response property of a printer head. CONSTITUTION: The ink jet printer head is comprised of a substrate(100) having an insulation layer(102), a resistor layer(104a) having a V-shaped recess disposed on the insulation layer, an electrode(106a) to expose the V-shaped recess, a resistor chamber barrier formed on the electrode to expose the V-shaped recess, a resistor chamber(112) containing a working liquid and defined between the electrode and the resistor chamber barrier to contact with the V-shaped recess, a membrane plate(158) comprised of a photosensitive film(156) and a metal layer, an ink chamber barrier(178a) formed on the membrane plate to expose the surface of the membrane plate corresponding to the resistor chamber, an ink chamber(182) containing ink and defined between the ink chamber barriers to contact with the membrane plate, and a nozzle plate(176) having a penetrating hole shaped nozzle(180) and formed between the ink chamber and the ink chamber barrier to expose the top of the ink chamber.
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