Verfahren zur Herstellung eines Dünnfilms eines Verbund-Metalloxid-Dielektrikums

摘要

A precursor solution in a sol state is synthesized in a first step. This precursor solution is composed of component elements of materials of the composite metal-oxide dielectric to be manufactured. In a second step, this precursor solution is made a thin film by spin coating. In a third step, this thin film in the sol state is dried to convert it into a thin film of dry gel. Thereafter, in a fourth step, the thin film of dry gel is subjected to a heat treatment for thermally decomposing and removing organic substances within the dry gel thin film and simultaneously crystallizing this gel state thin film.