发明名称 |
Rapid-closing high vacuum valve for use in particle accelerators or ion implantation apparatus has closing plate operated by electronically detonated propelling charge or detonator pellet |
摘要 |
The rapid-closing high vacuum valve has the closing plate (16) operated by an electronically detonated propelling charge or detonator pellet.
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申请公布号 |
DE19906054(A1) |
申请公布日期 |
2000.08.31 |
申请号 |
DE19991006054 |
申请日期 |
1999.02.12 |
申请人 |
SCHOTT, WOLFGANG |
发明人 |
SCHOTT, WOLFGANG;HOMOLKA, JOSEF |
分类号 |
F16K17/40;F16K51/02;H01J37/18;H05H7/00;(IPC1-7):F16K17/36 |
主分类号 |
F16K17/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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