发明名称 Rapid-closing high vacuum valve for use in particle accelerators or ion implantation apparatus has closing plate operated by electronically detonated propelling charge or detonator pellet
摘要 The rapid-closing high vacuum valve has the closing plate (16) operated by an electronically detonated propelling charge or detonator pellet.
申请公布号 DE19906054(A1) 申请公布日期 2000.08.31
申请号 DE19991006054 申请日期 1999.02.12
申请人 SCHOTT, WOLFGANG 发明人 SCHOTT, WOLFGANG;HOMOLKA, JOSEF
分类号 F16K17/40;F16K51/02;H01J37/18;H05H7/00;(IPC1-7):F16K17/36 主分类号 F16K17/40
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