发明名称 |
ELECTRONIC DEVICE, METHOD OF MANUFACTURING POWER SUPPLY BOARD AND IMAGING DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE AND ELECTRON SOURCE BOARD |
摘要 |
<p>A device for manufacturing an electronic device comprises deaeration means (103) for removing gas dissolving in a liquid (107) that includes the materials of an electronic device; nozzle means for ejecting liquid (107) in the form of droplets (6); and means for controlling the relative position of the nozzle means (6) and a substrate (101) on which an electronic device are to be formed, and the device applies droplets to predetermined areas of the substrate (101). The deaeration means (103) includes an airtight container (105) filled with hollow fibers consisting of gas-permeable semipermeable membranes, and a vacuum device (106) for exhausting the airtight container (105).</p> |
申请公布号 |
WO0050246(A1) |
申请公布日期 |
2000.08.31 |
申请号 |
WO2000JP01024 |
申请日期 |
2000.02.23 |
申请人 |
CANON KABUSHIKI KAISHA;MISHIMA, SEIJI |
发明人 |
MISHIMA, SEIJI |
分类号 |
H01J9/02;B05C5/00;B05C13/02;B05D5/12;B41J2/05;B41J2/175;B41J2/19;C23C16/06;H05K3/10;(IPC1-7):B41J2/19 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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