Verfahren und Vorrichtung zum Behandeln von Substraten

摘要

For the uniform coating of a substrate (13) the invention provides for a device and a method for coating substrates by which the substrate is supported on a substrate holder (5) in such a way that a substrate surface (15) to be coated is bare and the substrate is turned with the substrate holder. The method and device are characterized in that a cover (20) can be fixed to the substrate holder and together with said substrate holder forms a closed chamber for the substrate.