发明名称 |
TRANSPARENT CONDUCTIVE LAMINATE, ITS MANUFACTURING METHOD, AND DISPLAY COMPRISING TRANSPARENT CONDUCTIVE LAMINATE |
摘要 |
<p>A transparent conductive laminate in which a crystalline transparent conductive film substantially made of In-Sn-O is formed on the transparent substrate composed of a thermoplastic polymer film. The crystalline part of the transparent conductive film (ITO film) is a transparent conductive laminate having a special crystal structure in which the strength of X-rays diffracted by the (222) crystal plane or the (440) crystal plane is the highest and the ratio ¢X440/222! of the strength of X-rays diffracted by the (440) crystal plane to that by the (222) crystal plane is within a range of 0.2 to 2.5. The transparent conductive laminate is low in surface resistivity and useful as an electrode material such as of a liquid crystal display, an electroluminescence device, or a touch panel. The transparent conductive laminate is manufactured by a combination of control of the film-forming atmosphere in sputtering and heat treatment under specific conditions after the film is formed.</p> |
申请公布号 |
CA2330123(A1) |
申请公布日期 |
2000.08.31 |
申请号 |
CA20002330123 |
申请日期 |
2000.02.23 |
申请人 |
TEIJIN LIMITED |
发明人 |
HARA, HIROSHI;TSUBOI, SEIJI |
分类号 |
B32B9/00;C23C14/00;C23C14/08;C23C14/34;C23C14/58;H01B5/14;(IPC1-7):H01B5/14;B32B7/02;H01L31/04 |
主分类号 |
B32B9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|