发明名称 |
Photoelectric path and angle measurement system for measuring displacement of two objects relative to each other has photoreceivers arrange din matrix array in four pairings on both sides of LED |
摘要 |
The system has a reference grating (G2), a grating measurement scale (G1), and arrangement of photoreceivers and an evaluation circuit. The photoreceivers are arranged in a matrix array in four pairings or a multiple of this, on both sides of the light source (LED) in such a way that each of the four electrically connected photoreceiver pairs have the same distance to the light source. The LED is used as the light source which is integrated into the photoreceiver array with sinks arranged on the surface of the chip (CH).
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申请公布号 |
DE19961250(A1) |
申请公布日期 |
2000.08.31 |
申请号 |
DE19991061250 |
申请日期 |
1999.12.18 |
申请人 |
CIS INSTITUT FUER MIKROSENSORIK GGMBH |
发明人 |
KLAPPER, FRANZ;FREITAG, HANS-JOACHIM;ORTLEPP, HANS GEORG;STEINKE, ARNDT |
分类号 |
G01D5/347;(IPC1-7):G01B11/02;G01B11/26 |
主分类号 |
G01D5/347 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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