发明名称 HEAT PROCESSING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a heat processing device in which a processing efficiency, a throughput, quality and a thermal efficiency can be improved, damage when poor products are produced can be reduced, an adjustment of the amount of production can be freely performed, a furnace mounting area can be reduced and a processed material can be transferred directly. SOLUTION: A processed item is supported directly without showing any relative sliding within an airtight space in a process tube 11 and transferred intermittently in an upward or downward direction. A furnace 3 is formed with a feeding port 21 and a discharging port 22 for the processed material in an upward or downward spaced apart relation. There are provided a feeding side purge section having a connecting port with the feeding port 21 and an inlet port for the processed material, a discharging side purge section having a connecting port with a discharging port 22 and a discharging port for the processed material, wherein the feeding port 21, the connecting port, the feeding port, the discharging port 22, the connecting port and the discharging port are opened or closed. The processed material is supplied to a transporting mechanism 32 through the feeding port 21, fed from the transporting mechanism 32 into the discharging side purge section through the discharging port 22 and fed out of the discharging side purge section through the feeding-out port.</p>
申请公布号 JP2000234866(A) 申请公布日期 2000.08.29
申请号 JP19990038829 申请日期 1999.02.17
申请人 KOYO THERMO SYSTEM KK 发明人 KITAMURA HIROSHI;YAMAGUCHI KAZUYOSHI;KURITANI AKIRA;ARII HIRONOBU
分类号 H01L21/683;F27B9/04;F27B9/08;F27B9/14;F27D7/06;H01L21/22;H01L21/324;H01L21/68;(IPC1-7):F27B9/14 主分类号 H01L21/683
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