发明名称 PHOTOELECTRIC CONVERTING DEVICE, SOLID-STATE IMAGE PICKUP DEVICE, AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a photoelectric converting device having superior sensitivity and resolution without gradation in transfer efficiency and transferred quantity of charge. SOLUTION: An N-type region 5 which forms a photoelectric converting region 2, and a P-type region 6 which forms a channel stopping region 3 are arranged on the surface of a P-type silicon substrate 4, and a transparent electrode 1, consisting of polycrystalline silicon, is provided on the substrate 4 via an insulating film 7. The film thickness of the photoelectric converting region 2 on the transparent electrode 1 is formed smaller than the film thickness in parts other than the photoelectric converting region 2, and an antireflection film 8 consisting of a silicon nitride film, etc., is formed above the photoelectric converging region 2.
申请公布号 JP2000236080(A) 申请公布日期 2000.08.29
申请号 JP19990355692 申请日期 1999.12.15
申请人 NEC CORP 发明人 MURAKAMI ICHIRO;NAKASHIBA YASUTAKA
分类号 H01L27/14;H01L27/146;H01L27/148;(IPC1-7):H01L27/14 主分类号 H01L27/14
代理机构 代理人
主权项
地址