发明名称 Method and apparatus for etching coated substrates
摘要 A method for etching substrates, comprising providing at least a first and a second substrate having a coating selected from the group consisting of semiconductor coatings, metallic coatings, and mixtures thereof and introducing at least the first substrate and an etchant into a first tank to etch at least a portion of the coating from the first substrate, introducing at least the second substrate into a second tank and transferring the etchant from the first tank to the second tank to provide etch of at least a portion of the coatings from the second substrate, and removing the etched first substrate from the first tank.
申请公布号 AU3230400(A) 申请公布日期 2000.08.29
申请号 AU20000032304 申请日期 2000.02.11
申请人 FIRST SOLAR, LLC. 发明人 TODD J. DAPKUS;JOHN R. BOHLAND
分类号 C03C15/00;C03C17/06;C03C17/22;C03C17/34;C23F1/08;H01L21/00;H01L21/306;H01L21/311;H01L21/3213;H01L31/048;H01L31/18 主分类号 C03C15/00
代理机构 代理人
主权项
地址