| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a thin-film solar battery which have no defects in battery characteristics, such as short-circuit voltage, curve factor, and series resistance. SOLUTION: After forming a transparent electrode layer, heat treatment is conducted under prescribed conditions to prevent defective battery characteristics. As an apparatus for executing the heat treatment, a stepping roll method manufacturing apparatus is used which is provided with an unwinder chamber 290 having a core 281 for unwinding a substrate 201, a plurality of separate film formating chambers 280 as treatment spaces for forming a metal electrode layer, a photoelectric transfer layer, and a transparent electrode layer respectively, and a winder chamber 291 having a winding core 283, in a common chamber 281 of a vacuum chamber. In a subsequent-stage of the film formating chamber 280 for forming a transparent electrode layer, a heat treatment chamber 282 is disposed. The heat treatment chamber 282 consists of a box-like lower chamber 301 and an upper chamber 300, which are disposed facing each other and is a separate treatment space similar to the film formating chamber 280. In the heat treatment chamber 282, a heating body 302 with a built-in heater is so disposed as to be brought into contact with the transparent electrode layer.</p> |
