发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 <p>PROBLEM TO BE SOLVED: To obtain a semiconductor device using a TFT structure of high reliability. SOLUTION: A gate electrode 105 of a TFT is formed by first, second, and third conductive layers 105a, 105b, and 105c respectively. In an LDD region 108, there are two parts that overlap and do not overlap with the gate electrode 105 via a gate insulating film 103. As a result, deterioration at turning on the TFT is prevented, and at the same time reducing a leakage current when the TFT is turned off.</p>
申请公布号 JP2000236096(A) 申请公布日期 2000.08.29
申请号 JP19990353971 申请日期 1999.12.14
申请人 SEMICONDUCTOR ENERGY LAB CO LTD;SHARP CORP 发明人 OTANI HISASHI;YAMAZAKI SHUNPEI;ITO MASATAKA
分类号 H01L27/092;G02F1/136;G02F1/1365;G02F1/1368;H01L21/336;H01L21/8238;H01L29/786;(IPC1-7):H01L29/786;H01L21/823 主分类号 H01L27/092
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