发明名称 SUBSTRATE FINISHING DEVICE USING MAGNETIC FLUID
摘要 PROBLEM TO BE SOLVED: To dynamically control the viscosity and flow rate of re-circulated fluid by providing a fluid discharge system for controlling the viscosity of a passing fluid in response to a flow meter signal of a flow meter disposed in the interior and a fluid pressure signal at an inlet of a capillary viscometer disposed at an outlet. SOLUTION: A closed fluid discharge system 78 supplies a fixed target flow of a fluid with a target viscosity, scrapes off the same from a bearing surface 32 by a scraper 44 and returns the same to a mixing and proportioning chamber 80. The re-proportioned fluid is taken out from the mixing and proportioning chamber 80 by a discharge pump 82 to be discharged through a flow meter 84. The flow meter 84 and a driving device of a pump 82 are connected to a computer 86. The fluid is passed from the flow meter 84 throught a nozzle 32 to be discharged on the bearing surface 32. Further, the nozzle 32 is a capillary rheometer or a capillary viscosimeter, and provided with a pressure sensor 96 for detecting the line pressure at an inlet to the capillary and sending a detection signal to the computer 86.
申请公布号 JP2000233359(A) 申请公布日期 2000.08.29
申请号 JP19990369992 申请日期 1999.12.27
申请人 QED TECHNOLOGIES INC 发明人 KORDONSKI WILLIAM I;GOLINI DONALD;HOGAN STEPHEN;DUMAS PAUL R
分类号 B24B1/00;B24B31/112;G01N11/04;(IPC1-7):B24B31/112 主分类号 B24B1/00
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