发明名称 |
Apparatus and method for rotating semiconductor objects |
摘要 |
A device and method for the automated rotating of semiconductor objects during the fabrication process is disclosed. The device uses a slotted base fixture with a channel, lifting members with ducts, and a vacuum. Semiconductor objects are rotated from a vertical position to a substantially horizontal essentially evenly spaced parallel configuration. The positioning of the semiconductor objects by the device is such that the facet end of each semiconductor object remains undisturbed. The configuration of the semiconductor objects allows for quick and easy transfer to a storage surface or transfer to further semiconductor processing steps.
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申请公布号 |
US6109861(A) |
申请公布日期 |
2000.08.29 |
申请号 |
US19980135186 |
申请日期 |
1998.08.17 |
申请人 |
LUCENT TECHNOLOGIES, INC. |
发明人 |
FREUND, JOSEPH MICHAEL;GRUSZKA, RAYMOND FRANK;PRZYBYLEK, GEORGE JOHN;ROMERO, DENNIS MARK |
分类号 |
H01L21/677;H01L21/683;(IPC1-7):B65G47/24 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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