发明名称 Apparatus and method for rotating semiconductor objects
摘要 A device and method for the automated rotating of semiconductor objects during the fabrication process is disclosed. The device uses a slotted base fixture with a channel, lifting members with ducts, and a vacuum. Semiconductor objects are rotated from a vertical position to a substantially horizontal essentially evenly spaced parallel configuration. The positioning of the semiconductor objects by the device is such that the facet end of each semiconductor object remains undisturbed. The configuration of the semiconductor objects allows for quick and easy transfer to a storage surface or transfer to further semiconductor processing steps.
申请公布号 US6109861(A) 申请公布日期 2000.08.29
申请号 US19980135186 申请日期 1998.08.17
申请人 LUCENT TECHNOLOGIES, INC. 发明人 FREUND, JOSEPH MICHAEL;GRUSZKA, RAYMOND FRANK;PRZYBYLEK, GEORGE JOHN;ROMERO, DENNIS MARK
分类号 H01L21/677;H01L21/683;(IPC1-7):B65G47/24 主分类号 H01L21/677
代理机构 代理人
主权项
地址