发明名称 Radial wire bonder and selectable side view inspection system
摘要 A wire bonding machine having a wire bonding head that provides five directions of movement or degrees of freedom. The radial direction of movement supports the wire bonding process and reduces the moving mass of the wire bonder during the generation of the wire bonds. The wire bonding machine further includes a selectable side view inspection system. Through a group of optical components, the assembly process can be selectively viewed from either a side view or a top view. The side view of the assembly process provides for improved analysis of the wire bond quality which can be monitored by a camera.
申请公布号 US6109501(A) 申请公布日期 2000.08.29
申请号 US19990233732 申请日期 1999.01.11
申请人 ASM ASSEMBLY AUTOMOTION LTD. 发明人 CHENG, CHI WAH;YUE, KA ON;WONG, CHIU FAI
分类号 H01L21/00;H01L21/607;H01L21/66;(IPC1-7):B23K20/10 主分类号 H01L21/00
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