| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for forming an amorphous diamond film capable of forming an amorphous diamond film of high quality large in film thickness by reducing the content of moisture and to provide a method for forming it. SOLUTION: This invention is a device 2 for forming an amorphous diamond film by irradiating a target 14 contg. a carbon component with laser beams to emit an emission and depositing the emission on the surface of a substrate 16, which is provided with a chamber 4 stored with the target 14 and the substrate 16 at the inside, two-luminous flux generating means 12 and 24 generating two laser beams, a 1st optical system 26 of irradiating the target 14 with either laser beam L1, a 2nd optical system 28 of irradiating the deposition film of the emmision deposited on the substrate 16 with the other laser beam L2 and a cooling member 30 located around the substrate 16, and moisture in the chamber 4 is condensed on the surface of the cooling member 30. |
