| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method which facilitates simple manufacture of a plurality of cold cathode field emission device having uniform characteristics. SOLUTION: This manufacturing method for a cold cathode field emission device comprises steps of forming a patterned electrode layer 11 on an insulative base 11, forming an interlayer insulating layer 12 on the base 11 including the layer 11, forming opening parts 15, 13 where the layer 11 is exposed at bottom thereof and at least the layer 12 is penetrated after a gate electrode 14 made of a first conductive layer is formed on the layer 12, forming sidewall 16 made of insulating material on sidewall of the opening parts 15, 13, forming a second conductive layer on whole surface including inside of the opening parts 15, 13 by physical or chemical vapor phase epitaxy method after reduction of diameters of the opening parts 15, 13, forming a columnar emitter electrode 18 and of the second conductive layer within the opening parts 15, 13 by etchback of the second conductive layer and removing at least upper part of the sidewall 16.</p> |
