发明名称 LIQUID CRYSTAL DISPLAY PANEL AND ITS PRODUCTION
摘要 <p>PROBLEM TO BE SOLVED: To remove an etching stopper layer existing on the crossing section of a gate line and a signal line without increasing the exposure processes and to decrease the number of processes, especially the number of exposure processes by forming one or plural openings on the crossing section. SOLUTION: A gate electrode 4 and a gate line 5 integrally connected to the gate electrode 4 are formed on a light-transmitting substrate 2. Two rectangular slit-like openings 5b are formed at the section 5a (crossing section) where the gate line 5 crosses a signal line through an insulating layer. When an etching stopper 12 in the almost same form as a photoresist, namely in the almost same form as the gate electrode 4 and gate line 5, is to be formed by wet etching, the etching stopper layer 12 is removed from the crossing section 5a where the openings 5b are formed by the side-etching effect that the etching stopper 12 is etched in the width direction.</p>
申请公布号 JP2000235190(A) 申请公布日期 2000.08.29
申请号 JP19990034227 申请日期 1999.02.12
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 TOKUHIRO OSAMU;UEDA HIROYUKI
分类号 G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):G02F1/134 主分类号 G02F1/1343
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