| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate with recessing parts for a micro lens, which is easy to perform positioning. SOLUTION: This substrate 2 with recessing parts for a micro lens, is formed by successively performing a step to form a mask layer 6 of poly crystalline silicon on a surface of a quartz glass substrate 5 with a CVD method, a step to form a first opening 61 and a second opening 62 on the mask layer 6 with dry etching, a step to form a protective layer 7 composed of an Au/Cr film on the mask layer 6 with sputtering in order to form alignment masks 4, a step to form many recessing parts 3 on the quartz glass substrate 5 with wet etching, a step to remote the mask layer 6 with dry etching and a step to form the alignment masks 4 by removing the protective layer 7 with wet etching.
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