| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device for conducting four-wire resistance measurement capable of realizing highly precise measurement and highly speedy measurement concurrently. SOLUTION: This measuring device for conducting four-wire resistance measurement is provided with a constant current source circuit 49 for measurement for supplying a constant current to a plus current terminal 3 and a minus current terminal 6, an operational amplifier 10 for connecting the terminal 6 to its output terminal, connecting a non-inverting input terminal to its zero potential point and connecting an inverting input terminal to a plus voltage terminal 4, and a pre-amplifier 7 for detecting a potential difference between a minus voltage terminal 5 and the zero potential point. Potential of the plus voltage terminal 4 is controlled to get to zero potential by the operational amplifier 10, a minus side voltage generated between the minus voltage terminal 5 and the zero potential point is detected by the pre-amplifier 7, and a voltage generated in both ends of a measured object are detected thereby to find a resistance value.
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