发明名称 Interconnection with integrated corrosion stop
摘要 An interconnection structure for a semiconductor circuit is provided employing a conductor structure electrically connected to conductive wiring located on a different level than the conductor structure. The conductor structure comprises a relatively low resistivity metal. A barrier layer of a corrosion resistant metal is located intermediate the relatively low resistivity metal and wiring to thereby separate the wiring and relatively low resistivity metal.
申请公布号 US6111301(A) 申请公布日期 2000.08.29
申请号 US19980066121 申请日期 1998.04.24
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 STAMPER, ANTHONY K.
分类号 H01L23/00;H01L23/525;(IPC1-7):H01L29/00;H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/00
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