| 摘要 |
PROBLEM TO BE SOLVED: To provide a mixed gas generating device for diluting high density diborane gas with hydrogen gas, and supplying it to an epitaxial device. SOLUTION: This device 10 is constituted of a first buffer tank 5, a second buffer tank 6, a third buffer tank 7, and a co-pressure adjusting means 8. The first buffer tank 5 houses high concentration diborane gas, and the second buffer tank 6 houses hydrogen gas. The first buffer tank 5 and the second buffer tank 6 adjusts the in-tank pressure into co-pressure by the co-pressure adjusting means 8. The fit buffer tank 5 and the second buffer tank 6 are communicated and connected through a first pipe 11 and a second pipe 12, whose inner diameters and length are the same with the third buffer tank 7. The ratio of the number of the first pipe 11 to the number of the second pipes 12 is set at the set mixing rate of the diborane gas to the hydrogen gas.
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