发明名称 |
Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber |
摘要 |
A semiconductor processing system comprising a semiconductor processing chamber, a light, a temperature detector, and a member. The light is positioned to heat the confines of the chamber. The temperature detector measures the temperature at the location within the chamber. The member has a translucent quartz shell and opaque core and shields the location from light emanating from the light source.
|
申请公布号 |
US6110284(A) |
申请公布日期 |
2000.08.29 |
申请号 |
US19980004820 |
申请日期 |
1998.01.09 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHEN, CHEN-AN;HO, HENRY;CHEN, STEVEN A. |
分类号 |
C23C16/48;C30B25/10;C30B31/12;H01L21/00;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/48 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|