| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a particle analyzing device by means of an electron probe microanalyzer capable of correctly determining the compounds to be analyzed even if particles are small enough to fall under an electron diffusion domain of an electron beam irradiated to a specimen. SOLUTION: In this particle analyzing device, an electron probe microanalyzer, irradiating an electron beam to a specimen and analyzing elements in a specimen surface based on characteristic X-rays emitted from the specimen, is made up of a reflected electron detector 8 or a secondary electron detector 9 for obtaining an electron image of the specimen surface, a means 27 for computing the gravity center of particles in the surface of the specimen, a scanning coil 5 or a specimen-stage motor control circuit 23 for moving the electron beam to the position of the gravity center and fixing it thereto, a WDS 16 or an EDS 17 for quantatively analyzing the elements of the particles, a means 28 for computing atomic ratios from the weight concentrations of the elements based on a result of the quantitative analysis, and a means 29 for determining the compounds based on the atomic ratio, and grouping and totalizing them.</p> |
