发明名称 SOI (silicon on insulator) device and method for fabricating the same
摘要 An SOI device and a method for fabricating the same in which floating body effect is reduced and the performance is thus improved are disclosed, the SOI device including a semiconductor substrate; a first buried insualting film formed on the semiconductor substrate; a first conductivity type silicon layer formed on the first buried insulating film; an active region and a first conductivity type semiconductor layer formed to be isolated on predetermined areas of the first conductivity type silicon layer; second buried insulating films formed to be isolated from one another in the first conductivity type silicon layer to connect the first conductivity type semiconductor layer with the active region through the first conductivity type silicon layer; a gate electrode formed on the active region; impurity region formed in the semiconductor substrate at both sides of the gate electrode; and contact pads formed on the first conductivity type silicon layer.
申请公布号 US6110769(A) 申请公布日期 2000.08.29
申请号 US19980197580 申请日期 1998.11.23
申请人 LG SEMICON CO., LTD. 发明人 SON, JEONG HWAN
分类号 H01L27/12;H01L21/02;H01L21/336;H01L21/84;H01L29/786;(IPC1-7):H01L21/76 主分类号 H01L27/12
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