Lewis base adducts of anhydrous mononuclear tris( beta -diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same

摘要

Anhydrous mononuclear Lewis base adducted tris( beta -diketonato) bismuth complexes, useful as precursors for chemical vapor deposition of bismuth, for producing Bi-containing films of significantly improved stoichiometry, morphology and functional character, as compared to films obtained from dinuclear tris( beta -diketonato) bismuth complexes of the prior art.