| 摘要 |
PURPOSE: A carrier system provides to carry wafer between many wafer processor unit, to shorten the time of manufacture in the semiconductor manufacturing unit, and decrease cost of fabrication; CONSTITUTION: A carrier system comprises a wafer processor unit A to Z which perform process of A to Z is aligned on a wafer, a chamber(14) is formed parallel to the wafer processor unit, a guide rail(11) is mounted in the chamber(14), a traveller(12) which driving by a linear motor is mounted on the guide rail(11); a wafer stacking robot(13) is mounted on the traveller(12)
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