METAL OXIDE SEMICONDUCTOR CAPACITOR USING DUMMY PHOTO ETCHING PATTERN

摘要

PURPOSE: A metal oxide semiconductor capacitor using dummy photo etching pattern provides a capacitor form of a dynamic random access memory array, CONSTITUTION: A semiconductor construction comprises an active array of a first construction element having a first manufacturing precision, and includes boundary region surroundings the active array-the boundary region has a second construction element having a second manufacturing precision that lower than the first manufacturing precision-the second construction element are insulated from the active array and includes a passive device for improve the action of the active array.