发明名称 |
Masks for use in optical lithography below 180 nm |
摘要 |
A mask for use on a layer of imaging material which is located on at least a portion of one surface of a substrate in a lithography process in accordance with one embodiment of the present invention includes a layer of a masking material which has an optical density of at least 4.0 for wavelengths at or below about 180 nm and a thickness of less than about 1000 angstroms. Materials, such as tungsten and amorphous silicon, can be used for the mask. |
申请公布号 |
AU2869400(A) |
申请公布日期 |
2000.08.25 |
申请号 |
AU20000028694 |
申请日期 |
2000.02.04 |
申请人 |
ROCHESTER INSTITUTE OF TECHNOLOGY |
发明人 |
BRUCE W. SMITH |
分类号 |
G03F1/00;G03F1/54;G03F7/09 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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