| 摘要 |
PURPOSE: A fluid-suction device is provided to remove fluid which remains on a substrate and a substrate carrier underneath. CONSTITUTION: A support element(2,3) having suction pipes(6,7) and a container(1) are lifted above a fluid cover(11). At this time, a substrate carrier(4) is got dry but treatment fluid remains on legs(11, 12) underneath of the substrate carrier(4). To remove the remained treatment fluid, the substrate carrier(4) and a substrate(5) are sucked through the suction pipes(6,7). Consequently, the substrate carrier(4) may be got dry simply and fast.
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