发明名称 |
METHOD OF COVERING EDGES WITH DIAMOND CARBON |
摘要 |
A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5x1010 per cm3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment. |
申请公布号 |
PL337485(A1) |
申请公布日期 |
2000.08.28 |
申请号 |
PL19980337485 |
申请日期 |
1998.06.11 |
申请人 |
NORTHEASTERN UNIVERSITY |
发明人 |
HOPWOOD JEFFREY A.;PAPPAS DAVID L. |
分类号 |
B43K1/00;B26B21/60;C23C16/26;C23C16/27;(IPC1-7):C23C16/27 |
主分类号 |
B43K1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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