METHOD FOR MANUFACTURING METAL-OXIDE-METAL CAPACITOR

摘要

PURPOSE: A method for manufacturing metal-oxide-metal(MOM) capacitor is provided to eliminate a defect on a surface of a metal plug by preventing a stack of metal layers of a lower metal electrode affecting reliability and yield. CONSTITUTION: A method for manufacturing metal-oxide-metal(MOM) capacitor comprises the steps of: forming a dielectric layer adjacent to a substrate; forming a metal plug of the dielectric layer with the metal plug having at least one of an undesired topographical defect in an uppermost surface portion; and forming a lower metal electrode on the dielectric layer and the metal plug in which the lower metal electrode includes a stack of a metal layer, a lower metal nitric layer, an aluminum layer, and an upper metal nitric layer.