| 摘要 |
PURPOSE: A capacitor of an integrated circuit is provided to deepen a trench without loosening a metal plug or separating the metal plug from an internal connection line by an anchor-type plug. CONSTITUTION: A capacitor of an integrated circuit comprises a substrate(24), a first dielectric layer(26), a first metal plug(30), an internal connection line(32), a second dielectric layer(36), a second metal plug(22), a third dielectric layer(48), and an upper electrode. The first dielectric layer has a first trench inside, adjacent to the substrate. The first metal plug is extended upward in the first trench. The internal connection line contacts the first metal plug to define an anchor-type dented portion(34) on a side surface opposite to the first metal plug, placed on the first trench. The second dielectric layer is formed on the internal connection line, having a second trench inside. The second metal plug includes a body(40) extending upward in the second trench and anchor-type portions(42) coupled to the anchor-type dented portion for fixing/adhering a second metal plug. The third dielectric layer is adjacent to an upper portion of the second metal plug. The upper electrode is formed on the third dielectric layer.
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