BACK-END-OF-THE-LINE DECOUPLING CAPACITOR

摘要

PURPOSE: A back-end-of-the-line(BEOL) decoupling capacitor is to provide a thin film dielectric for forming a capacitor using the BEOL wiring level as a capacitor electrode, by having the dielectric have higher permittivity than a conventional dielectric while not against the BEOL metallurgy. CONSTITUTION: A back-end-of-the-line(BEOL) decoupling capacitor comprises an amorphous dielectric having a permittivity of more than 10, the amorphous dielectric being disposed between two electrodes. The amorphous dielectric is manufactured in a temperature below 450°C, having a thickness from 25 to 500 milli meters.