Device for transporting disc-shaped substrates has gas cushion formed between underside of substrate carriers and plate surface and arrangement for moving carriers on gas cushion

摘要

The transport device has a plate (16) with a number of gas-carrying channels (17) that end in the upper side of the plate and that are connected to a gas intake. A gas cushion (15) is formed between the underside of substrate (5) carriers (3) and the plate surface and there is an arrangement for moving the carriers on the gas cushion.