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发明名称
Optimierter Randabschluss von Halbleiter-Bauelementen
摘要
申请公布号
DE19881806(D2)
申请公布日期
2000.08.24
申请号
DE19981081806D
申请日期
1998.11.23
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
SITTIG, ROLAND;NAGEL, DETLEF;DUDDE, RALF-ULRICH;WAGNER, BERND;REIMER, KLAUS
分类号
H01L29/06;H01L29/40;H01L29/47;H01L29/74;H01L29/78;H01L29/861;H01L29/872;(IPC1-7):H01L29/06
主分类号
H01L29/06
代理机构
代理人
主权项
地址
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