| 摘要 |
A thermal actuator (7) for micro electromechanical systems (MEMS) comprises two arms (10, 11), with a gap between them for improving operational characteristics and reducing shear stress, where one arm is arranged to undergo thermal expansion to cause the actuator to bend. The actuator (7) may be used to operate a paddle (8) for an ink jet nozzle chamber (2). An aperture in the nozzle chamber (2) has a raised rim (19) for forming a meniscus with the actuator (7), for preventing leakage from the nozzle chamber (2). The paddle (8) has a structural support portion (18) which acts as a spacer to prevent contact between the paddle (8) and a meniscus (3) at the nozzle (4). The nozzle chamber (2) has an internal protrusion, aligned with and opposite to the paddle (8) in its non-ejection state, which aids rapid refill of the nozzle chamber (2) after ejection.
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