发明名称 |
Poliervorrichtung mit einem Plattformaufbau, der auf drei Säulen angebracht ist |
摘要 |
<p>A polishing machine includes a platform assembly mounted within three support columns. The platform assembly includes fluidically pressurized bladders for urging the upper polish plate toward and away from the lower polish plate. In one embodiment a movable support column is suspended from an overlying frame. The support column is engaged with the upper polish plate so as to selectively raise and lower the platform assembly. In another embodiment, the platform is raised and lowered by threaded shafts so as to engage and thereby displace the upper polish plate.</p> |
申请公布号 |
DE19882679(T1) |
申请公布日期 |
2000.08.24 |
申请号 |
DE1998182679T |
申请日期 |
1998.08.28 |
申请人 |
SPEEDFAM CORP., CHANDLER |
发明人 |
ANDERSON, ROBERT L.;MANSEAU, MICHAEL;DERZA, JANUSZ ALEKSANDER;BUSSAN, JOHN EDWARD |
分类号 |
B24B41/02;B24B7/17;B24B7/22;B24B37/08;(IPC1-7):B24B7/17 |
主分类号 |
B24B41/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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