SELF-CLEANING ETCH PROCESS,申请号EP19980953598-传众专利搜索

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发明名称	SELF-CLEANING ETCH PROCESS
摘要
申请公布号	EP1029345(A1)	申请公布日期	2000.08.23
申请号	EP19980953598	申请日期	1998.10.15
申请人	APPLIED MATERIALS, INC.	发明人	QIAN, XUE-YU;SUN, ZHI-WEN;JIANG, WEINAN;CHEN, ARTHUR, Y.;YIN, GERALD, ZHEYAO;YANG, MING-HSUN;KUO, MING-HSUN;MUI, DAVID, S., L.;CHINN, JEFFREY;PAN, SHAOHER, X.;WANG, XIKUN
分类号	H01L21/302;H01L21/02;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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