发明名称 Apparatus and method for positioning an object at multiple positions within an enclosure
摘要 An apparatus for positioning an object at multiple positions within an enclosure has a moveable positioning member attached to a linear motor, both of which are positioned within the enclosure. The moveable positioning member is adapted to receive and support the object. A control signal directs the motion of the linear motor which moves the moveable positioning member and, thus, the object. An insulated conductor extends through the wall of the enclosure and allows electrical communication through the enclosure wall. The insulated conductor communicates with a power supply and a control mechanism exterior the enclosure. A flexible connection line, adapted to avoid contact with the enclosure, provides communication between an insulated conductor and the linear motor so that the linear motor is in communication with the power supply and the control mechanism.
申请公布号 US6106582(A) 申请公布日期 2000.08.22
申请号 US19970882567 申请日期 1997.06.25
申请人 APPLIED MATERIALS, INC. 发明人 HEYDER, ROGER;BREZOCZKY, THOMAS;MANOHARLAL, DEEPAK
分类号 H01L21/677;(IPC1-7):H01L21/00;H01L21/64;B65G49/07 主分类号 H01L21/677
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