发明名称 Cross-section sample staining tool
摘要 An apparatus for retaining at least one wafer sample in a desired orientation. The apparatus includes at least one support member that contains at least one slot having outwardly biasable opposing faces adapted to grip at least a portion of at least one wafer sample therein in a desired orientation. In addition, a handle may be attached to the at least one support member for facilitating manipulation and/or support thereof. Bending bars may also be attached to the at least one support member to facilitate application of a bending force to the at least one support member to aide in causing the at least one slot therein to open. When in an open position, each slot can receive at least a portion of a corresponding wafer sample therein or release a corresponding wafer sample therefrom.
申请公布号 US6106621(A) 申请公布日期 2000.08.22
申请号 US19980224642 申请日期 1998.12.31
申请人 MICRON TECHNOLOGY, INC. 发明人 MARTINI, FRANK E.
分类号 H01L21/00;H01L21/673;(IPC1-7):B05C13/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址