Abatement of NF3 using small particle fluidized bed

摘要

A process for destroying NF3 in a gas containing NF3 by contacting the gas with a fluidized bed of metal particles capable of reacting with NF3 wherein the metal particles have a particle size essentially no greater than approximately 300 microns. The process can be conducted in parallel connected switching fluidized beds wherein the beds are switched based upon achieving a predetermined bed height expansion based upon the reaction of the metal particles with the NF3.