| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate treating device which can reduce the possibility of swallowing up the outside air. SOLUTION: A carrying-in/out robot 20 holds a substrate W by means of its handling arm 21 and horizontally inserts the arm 21 into a chamber 10 from a pre-cleanroom 15. When the substrate W reaches a transferring position, the forward movement of the arm 21 is stopped and, at the same time, a substrate transferring section 30 ascends and receives the substrate W from the arm 21. Then the robot 20 horizontally retreats the arm 1 and causes the arm 21 to withdraw to the outside of a chamber 10 from the pre-cleanroom 15. In taking out the substrate W, the robot 20 reversely carries out the operations. Since the robot 20 does not make elevating/lowering operations when the robot 20 carries in/out the substrate W, the opening area of the pre-cleanroom 15 can be reduced by making the height of the opening lower. Therefore, the possibility of swallowing up the outside air can be reduced.</p> |
