发明名称 DRYING TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To discharge a gas blown off from an air-knife so that the gas is not blown up in a treatment tank. SOLUTION: The device blows off gas against base materials to dry them. The device comprises a treatment tank 1 wherein a feed port is formed on one end thereof while a delivery port is formed on the other end thereof, a transfer roller 7 which is provided in the tank 1 to transfer objects to be treated fed from the feed port toward the delivery port, air-knives 23, 24 which are disposed in the tank 1 to blow off gas against base materials being transferred by the roller 7 in a direction nearly in opposition to the transfer direction of the materials, and a gas discharge pipe 5b which is provided at the bottom of the tank 1 on the upstream side in the transfer direction of the materials to discharge the gas blown off from the knives 23, 24.
申请公布号 JP2000230783(A) 申请公布日期 2000.08.22
申请号 JP19990031170 申请日期 1999.02.09
申请人 SHIBAURA MECHATRONICS CORP 发明人 NISHIBE YUKINOBU;ISO AKINORI;KANEKO KATSUNORI;YAMAZAKI TAKAHIRO
分类号 H01L21/304;F26B15/12;(IPC1-7):F26B15/12 主分类号 H01L21/304
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