发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device where parasitic capacitance between a gate terminal and a drain terminal is reduced, the bonding intensity of a gate lead wire to the gate terminal is made to be not less than a prescribed intensity and reliability is improved. SOLUTION: A source terminal 33 and a gate terminal 34 are detached/ installed on the upper side of a semiconductor substrate 24. A drain terminal 25 is installed on a lower side. A mark 35 for estimating the position of the gate terminal 34 is installed in a different position in an equal distance from the gate terminal 34 on the upper side by simultaneously patterning a metallic material for forming terminal in forming the gate terminal 34.
申请公布号 JP2000232123(A) 申请公布日期 2000.08.22
申请号 JP19990032284 申请日期 1999.02.10
申请人 TOSHIBA CORP 发明人 KATO TOSHIMITSU
分类号 H01L21/60;H01L21/02;H01L29/78 主分类号 H01L21/60
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