发明名称 Illuminating apparatus
摘要 An illuminating apparatus which comprises a light source, an optical system for condensing light emitted from the light source and illuminating an object with the condensed light, and an optical member which absorbs light having a wavelength from 260 to 340 nm among the light emitted from the light source, wherein the optical member is made of glass or crystalline material to which metal is doped.
申请公布号 US6108126(A) 申请公布日期 2000.08.22
申请号 US19980131320 申请日期 1998.08.07
申请人 NIKON CORPORATION 发明人 HAGIWARA, SHIGERU;HIRAIWA, HIROYUKI;MORI, TAKASHI
分类号 G03F7/20;H01J61/30;H01J61/40;H01L21/027;(IPC1-7):F21V9/06 主分类号 G03F7/20
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