发明名称 |
Illuminating apparatus |
摘要 |
An illuminating apparatus which comprises a light source, an optical system for condensing light emitted from the light source and illuminating an object with the condensed light, and an optical member which absorbs light having a wavelength from 260 to 340 nm among the light emitted from the light source, wherein the optical member is made of glass or crystalline material to which metal is doped.
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申请公布号 |
US6108126(A) |
申请公布日期 |
2000.08.22 |
申请号 |
US19980131320 |
申请日期 |
1998.08.07 |
申请人 |
NIKON CORPORATION |
发明人 |
HAGIWARA, SHIGERU;HIRAIWA, HIROYUKI;MORI, TAKASHI |
分类号 |
G03F7/20;H01J61/30;H01J61/40;H01L21/027;(IPC1-7):F21V9/06 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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