| 摘要 |
PROBLEM TO BE SOLVED: To secure the airtightness of a container by suppressing the occurrence of a gas from a joining member when the container is airtightly sealed by forming a metallic coating film on the joining member. SOLUTION: A lid 3 is joined to a container 1 in which a piezoelectric vibrator 2 is fixed with a joining member. The joining member has such a structure that a coating film 6 is provided around a metallic joining member 5. Namely, after chromium is formed on the container 1 or lid 2 by the sputtering method and gold is formed on the chromium as a diffusion preventing layer, a joining member having a coating film is formed on the gold. Electronic parts having the vibrator 2 are made by airtightly sealing the container 1 provided with the joining member 5 having the coating layer and lid 2 by heating and pressurizing the container 1 and lid 2. The coating layer on the joining interface is diffused and dissipated at the joining of the lid 2 to the container 1, but the coating film 6 is left to surround the metallic joining member 5 and prevents generation of gas. When the coating film 6 is provided at least inside the member 5, the generation of the gas in the sealed space can be prevented.
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